METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSILE STRESS AT ELEVATED TEMPERATURES IN A PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM

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March 7, 2016

METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSILE STRESS AT ELEVATED TEMPERATURES IN A PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM

array(5) { [0]=> object(WP_Post)#4018 (24) { ["ID"]=> int(18982) ["post_author"]=> string(6) "990013" ["post_date"]=> string(19) "2024-03-18 18:20:37" ["post_date_gmt"]=> string(19) "2024-03-18 18:20:37" ["post_content"]=> string(0) "" ["post_title"]=> string(17) "McKenzie McEntyre" ["post_excerpt"]=> string(0) "" ["post_status"]=> string(7) "publish" ["comment_status"]=> string(6) "closed" ["ping_status"]=> string(6) "closed" ["post_password"]=> string(0) "" ["post_name"]=> string(17) "mckenzie-mcentyre" ["to_ping"]=> string(0) "" ["pinged"]=> string(0) "" ["post_modified"]=> string(19) "2024-08-19 18:45:56" ["post_modified_gmt"]=> string(19) "2024-08-19 18:45:56" ["post_content_filtered"]=> string(0) "" ["post_parent"]=> int(0) ["guid"]=> string(64) "https://www.pattersonsheridan.com/?post_type=person&p=18982" ["menu_order"]=> int(0) ["post_type"]=> string(6) "person" ["post_mime_type"]=> string(0) "" ["comment_count"]=> string(1) "0" ["filter"]=> string(3) "raw" } [1]=> object(WP_Post)#4024 (24) { ["ID"]=> int(18897) ["post_author"]=> string(6) "990010" ["post_date"]=> string(19) "2024-02-07 17:07:32" ["post_date_gmt"]=> string(19) "2024-02-07 17:07:32" ["post_content"]=> string(0) "" ["post_title"]=> string(14) "Jessica Kostyo" ["post_excerpt"]=> string(0) "" ["post_status"]=> string(7) "publish" ["comment_status"]=> string(6) "closed" ["ping_status"]=> string(6) "closed" ["post_password"]=> string(0) "" ["post_name"]=> string(14) "jessica-kostyo" ["to_ping"]=> string(0) "" ["pinged"]=> string(0) "" ["post_modified"]=> string(19) "2024-08-19 18:37:19" ["post_modified_gmt"]=> string(19) "2024-08-19 18:37:19" ["post_content_filtered"]=> string(0) "" ["post_parent"]=> int(0) ["guid"]=> string(64) "https://www.pattersonsheridan.com/?post_type=person&p=18897" ["menu_order"]=> int(0) ["post_type"]=> string(6) "person" ["post_mime_type"]=> string(0) "" ["comment_count"]=> string(1) "0" ["filter"]=> string(3) "raw" } [2]=> object(WP_Post)#4025 (24) { ["ID"]=> int(18823) ["post_author"]=> string(6) "990010" ["post_date"]=> string(19) "2023-11-14 05:05:35" ["post_date_gmt"]=> string(19) "2023-11-14 05:05:35" ["post_content"]=> string(0) "" ["post_title"]=> string(11) "Ryan Sandor" ["post_excerpt"]=> string(0) "" ["post_status"]=> string(7) "publish" ["comment_status"]=> string(6) "closed" ["ping_status"]=> string(6) "closed" ["post_password"]=> string(0) "" ["post_name"]=> string(11) "ryan-sandor" ["to_ping"]=> string(0) "" ["pinged"]=> string(0) "" ["post_modified"]=> string(19) "2023-11-17 20:57:44" ["post_modified_gmt"]=> string(19) "2023-11-17 20:57:44" ["post_content_filtered"]=> string(0) "" ["post_parent"]=> int(0) ["guid"]=> string(64) "https://www.pattersonsheridan.com/?post_type=person&p=18823" ["menu_order"]=> int(0) ["post_type"]=> string(6) "person" ["post_mime_type"]=> string(0) "" ["comment_count"]=> string(1) "0" ["filter"]=> string(3) "raw" } [3]=> object(WP_Post)#4026 (24) { ["ID"]=> int(18778) ["post_author"]=> string(6) "990010" ["post_date"]=> string(19) "2023-09-28 20:17:27" ["post_date_gmt"]=> string(19) "2023-09-28 20:17:27" ["post_content"]=> string(0) "" ["post_title"]=> string(10) "Valerie Yu" ["post_excerpt"]=> string(0) "" ["post_status"]=> string(7) "publish" ["comment_status"]=> string(6) "closed" ["ping_status"]=> string(6) "closed" ["post_password"]=> string(0) "" ["post_name"]=> string(10) "valerie-yu" ["to_ping"]=> string(0) "" ["pinged"]=> string(0) "" ["post_modified"]=> string(19) "2024-08-19 19:07:57" ["post_modified_gmt"]=> string(19) "2024-08-19 19:07:57" ["post_content_filtered"]=> string(0) "" ["post_parent"]=> int(0) ["guid"]=> string(64) "https://www.pattersonsheridan.com/?post_type=person&p=18778" ["menu_order"]=> int(0) ["post_type"]=> string(6) "person" ["post_mime_type"]=> string(0) "" ["comment_count"]=> string(1) "0" ["filter"]=> string(3) "raw" } [4]=> object(WP_Post)#4668 (24) { ["ID"]=> int(18777) ["post_author"]=> string(6) "990010" ["post_date"]=> string(19) "2023-09-28 18:50:34" ["post_date_gmt"]=> string(19) "2023-09-28 18:50:34" ["post_content"]=> string(0) "" ["post_title"]=> string(15) "Tristan Kaskoun" ["post_excerpt"]=> string(0) "" ["post_status"]=> string(7) "publish" ["comment_status"]=> string(6) "closed" ["ping_status"]=> string(6) "closed" ["post_password"]=> string(0) "" ["post_name"]=> string(15) "tristan-kaskoun" ["to_ping"]=> string(0) "" ["pinged"]=> string(0) "" ["post_modified"]=> string(19) "2024-08-19 18:33:13" ["post_modified_gmt"]=> string(19) "2024-08-19 18:33:13" ["post_content_filtered"]=> string(0) "" ["post_parent"]=> int(0) ["guid"]=> string(64) "https://www.pattersonsheridan.com/?post_type=person&p=18777" ["menu_order"]=> int(0) ["post_type"]=> string(6) "person" ["post_mime_type"]=> string(0) "" ["comment_count"]=> string(1) "0" ["filter"]=> string(3) "raw" } }